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公开时间: 2000-11-02      申请时间: 1999-08-23
申请人: NIKON CORP

JP2000304618A



标题(英语)

IMAGING EQUIPMENT


摘要(英语)

PROBLEM TO BE SOLVED: To make characteristic proper to equipment variable by solving a trouble due to initial position deviation in a thermal type displacement element. SOLUTION: The inclination of each reflecting part 5 on a substrate 1 changes according to the heat generated in an infrared radiation absorbing part absorbing infrared ration from a heat source 31. Each of the reflecting parts 5 is obliquely irradiated with an almost parallel luminous flux 52 into which a reading light from a light source 10 turns via a lens system 11. The reflected luminous flux 53 passes the lens system 11. Out of the luminous flux 54 after passing, only the desired luminous flux passes selectively an optical flux limiting part 12. The passing luminous flux 55 reaches a photo detecting surface of a CCD 20 which is arranged conjugably to the reflecting parts 5 via a lens system 13, and an optical image composed of the image of each of the reflecting parts 5 is formed. The quantity of light of the image of each of the reflecting parts 5 is different in accordance with the inclination of the reflecting parts 5. The temperature of the substrate 1 is set by a temperature setting device 111 and the reading light is set by a light quantity setting device 14.


申请人详细信息

序号 名称 数据格式
1 NIKON CORP docdb

发明人详细信息

序号 名称 数据格式
1 ISHIZUYA TORU docdb

法律状态

序号 日期 法律代码 详细信息

文档历史

公开时间: 2000-11-02
JP2000304618A
申请时间: 1999-08-23
JP23616499

CPC分类


IPC分类

G01J5/48

专利家族

26382075

被引非专利信息

引用阶段 文档类型 文档信息

被引专利信息

标题 发明人 申请人 公开号/公开日期
专利大数据平台