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公开时间: 2010-04-27      申请时间: 2007-02-27
申请人: AGILTRON CORP

US7705307B1
patent for invention


标题(英语)

Thermal displacement-based radiation detector of high sensitivity


摘要(英语)

A radiation detector comprises an infrared radiation sensing micro mirror array, where each micro mirror is supported with a deformable cantilever beam having an organic layer for increased dynamic range. The radiation detector includes two or more sources of optical radiation for irradiating the micro mirror array, an image sensor array for receiving optical reflection from the micro mirror array, and an aperture plate for (i) spatially restricting optical radiation reaching the micro mirror array and (ii) spatially restricting reflected optical reflection reaching the image sensor array.


申请人详细信息

序号 名称 数据格式
1 AGILTRON CORP docdb

发明人详细信息

序号 名称 数据格式
1 ZHAO JING docdb
2 ZHANG LEI docdb

法律状态

序号 日期 法律代码 详细信息
1 20070904 AS ASSIGNMENT
2 20100204 AS ASSIGNMENT
3 20131206 REMI MAINTENANCE FEE REMINDER MAILED
4 20140425 FPAY FEE PAYMENT
5 20140425 SULP SURCHARGE FOR LATE PAYMENT
6 20160125 AS ASSIGNMENT
7 20171211 FEPP FEE PAYMENT PROCEDURE
8 20180528 LAPS LAPSE FOR FAILURE TO PAY MAINTENANCE FEES
9 20180619 FP EXPIRED DUE TO FAILURE TO PAY MAINTENANCE FEE

文档历史

公开时间: 2010-04-27
US7705307B1
申请时间: 2007-02-27
US71127507

CPC分类

G01J5/40, G01J5/08, G01J5/0831, G01J5/0896

IPC分类

B41J2/05

专利家族

42112458

被引非专利信息

引用阶段 文档类型 文档信息

被引专利信息

标题 发明人 申请人 公开号/公开日期
Thermally activated latch BROMLEY SUSAN;VOLLMERS KARL;NELSON BRADLEY J;MOTHILAL KAMAL;ROBERTS KEVIN; ADC TELECOMMUNICATIONS INC; US6664885B2/2003-12-16
Passive broadband infrared optical limiter device based on a micro-optomechanical cantilever array DALAKOS GEORGE;LORRAINE PETER;WU PINGFAN;LAWRENCE BRIAN;YENISCH WILLIAM TAYLOR; LOCKHEED CORP; US7184200B2/2007-02-27
Thermally conductive thermal actuator and liquid drop emitter using same CABAL ANTONIO;LEBENS JOHN A;BOND STEPHEN F; EASTMAN KODAK CO; US7073890B2/2006-07-11
Microelectromechanical elevating structures GOODWIN-JOHANSSON SCOTT HALDEN; MCNC; US6456420B1/2002-09-24
Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same ISHIZUYA TOHRU;AMEMIYA NOBORU;AKAGAWA KEIICHI; NIKON CORP; US6080988A/2000-06-27
Radiation imaging device and radiation detector ISHIZUYA TOHRU;KOYAMA MOTOO; NIKON CORP; US6339219B1/2002-01-15
Methods and apparatus for manufacturing electronic and electromechanical elements and devices by thin-film deposition and imaging GRIFFITH SAUL;JACOBSON JOSEPH M;MANALIS SCOTT; MASSACHUSETTS INST TECHNOLOGY; US2004035605A1/2004-02-26
Spectral volume microprobe arrays MODELL MARK;HED ZE EV;BEE DAVID;LIPSON DAVID;KWO JENNIE;EMANS MATTHEW;NORDSTROM ROBERT; MEDISPECTRA INC; US2004186382A1/2004-09-23
Bolometric Infrared Sensor Having Two-Layer Structure and Method for Manufacturing the Same LEE HONG-KI; OCAS CORP; US2007262256A1/2007-11-15
Controlled nanowire in permanent integrated nano-templates and method of fabricating sensor and transducer structures FONASH STEPHEN;SHAN YINGHUI;PENG CHIH-YI;KALKAN ALI KAAN;CUIFFI JOSEPH D;HAYES DANIEL;BUTTERFOSS PAUL;NAM WOOK JUN; FONASH STEPHEN;SHAN YINGHUI;PENG CHIH-YI;KALKAN ALI KAAN;CUIFFI JOSEPH D;HAYES DANIEL;BUTTERFOSS PAUL;NAM WOOK JUN; US2008135826A1/2008-06-12
Passive broadband infrared optical limiter device based on a micro-optomechanical cantilever array DALAKOS GEORGE;LORRAINE PETER;WU PINGFAN;LAWRENCE BRIAN;YENISCH WILLIAM T; LOCKHEED CORP; US2006131500A1/2006-06-22
Bi-material cantilevers with flipped over material sections and structures formed therefrom LIM SI-HYUNG;CHOI JONGEUN;HOROWITZ ROBERTO;MAJUMDAR ARUN; UNIV CALIFORNIA; US2006133961A1/2006-06-22
Thermal plastic deformation of RF MEMS devices SARKAR NEIL;GEISBERGER AARON; ZYVEX CORP; US2005162806A1/2005-07-28
Dynamically variable separation among nanoparticles for nano-enhanced Raman spectroscopy (NERS) molecular sensing ISLAM M S;WANG SHIH-YUAN;WILLIAMS R S;KUEKES PHILIP J;WU WEI;LI ZHIYONG; ISLAM M S;WANG SHIH-YUAN;WILLIAMS R S;KUEKES PHILIP J;WU WEI;LI ZHIYONG; US2007086001A1/2007-04-19
Nanoparticle Vibration and Acceleration Sensors OFEK ERAN;AXELROD NOEL;LICHTENSTEIN AMIR;PARDO-YISSAR VERED; PHYSICAL LOGIC AG; US2007138583A1/2007-06-21
Afm cantilevers and methods for making and using same HOH JAN H; HOH JAN H.; US2005011256A1/2005-01-20
Nanostructures, nanogrooves, and nanowires GUO TING; GUO TING; US2006046480A1/2006-03-02
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